MEMS

Micromechatronics

Victor Giurgiutiu

Mechatronics

Clarence W. de Silva

Numerical Simulation of Mechatronic Sensors and Actuators

Manfred Kaltenbacher

Nano- and microelectromechanical systems

Sergey Edward Lyshevski

Micro, nanosystems, and systems on chips

Alina Voda

MEMS and Microsystems

Tai-Ran Hsu

Micro-optomechatronics

Hiroshi Hosaka

Mechatronic Modeling and Simulation Using Bond Graphs

Shuvra Das

Introduction to Microfabrication

Sami Franssila